彩66

高端電子工藝裝備

【1】集成電路裝備

產業介紹:電控公司的集成電路裝備以七星電子(北方微)(A股代碼:002371)為載體,借助上市平臺和國家重大科技專項加快產業發展,產品以集成電路設備為主,并結合市場需求向光伏、先進封裝、LED、MEMS、光波導、功率器件和化合物半導體等應用領域拓展。七星電子(北方微)先后承擔11項國家重大科技02專項,技術水平快速提升,填補了國內12英寸高端刻蝕機、PVD、CVD、氧化爐、清洗機等設備技術空白,大部分產品實現了28nm的產業化認證,刻蝕機、PVD已開始14nm技術的研發。技術能力達到同技術代國際主流裝備水平。

 

12英寸28nm刻蝕機、PVD、氧化爐等設備均已進入了中芯國際和上海華力國內集成電路制造領軍企業大生產線,多款產品已成為LED、先進封裝、MEMS等泛半導體領的主流產品,市場開拓工作成效顯著,刻蝕機產品成功打入臺灣市場。其中12英寸、28nmHardMask PVD設備及12英寸55nm硅刻蝕設備已作為中芯國際的Baseline設備,代表了國內設備的最高水平。

重要產品:刻蝕設備(Etch)、化學氣相沉積設備(CVD)、物理氣相沉積設備(PVD)立式爐、LPCVD、超精細清洗機、ALD設備。

 

 

【2】鋰電裝備

北京電控可提供全套的鋰離子電池極片生產所需的攪拌、涂布、輥壓、分切設備,技術處于國內領先水平,接近國際同期水平。

 

成功研制大容量的(400L、600L、800L、1000L、2000L)攪拌設備,已掌握自動上料技術、攪拌過程程序化控制、攪拌料評價等技術;成功開發出了擠出式涂布設備,涂布速度10-20m/min(最高水平達到30m/min)。成功開發出了液壓伺服輥壓設備,極片軋制速度達到20-30m/min(最高水平達到60m/min),掌握了極片熱軋技術、輥電鍍技術、AGC液壓伺服控制型等核心技術。

 

分切設備可分切卷材寬度達700mm,生產效率達到50m/min(最高水平達到80m/min),并開發了設備CCD測控系統(國內唯一)降低了產品廢品率。于此同時,成功的搭建了20000Ah鋰離子動力電池中試線,為自產設備提供了工藝驗證平臺,具備提供整線解決方案的能力。

 

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